The ultra-high-speed deep ultraviolet TDI-ECCD camera series features the highest line frequency and the most TDI lines in the industry, with a maximum line frequency of up to 3 MHz and a maximum of 1024 TDI lines. This series also offers models that support a high dynamic range mode of 1024 + 256 lines, providing an extremely valuable visual solution for front-end optical inspection in semiconductor manufacturing processes.